Turbomolecular pump

Large air leak is preventing the turbo pump from reaching 50% of full speed

Foreline pump is not working correctly

If the foreline pump is not working correctly, it can prevent the turbomolecular pump from reaching its normal operating speed. Foreline pressure is not measured on an MSD equipped with a turbomolecular pump. See also Foreline pressure is too high.

High vacuum signal cable is not connected correctly (turbo pump)

Check the back of the MSD. Make sure the high vacuum signal cable (HIVAC SIGNAL) is securely connected to the back panel of the MSD and to the turbomolecular pump controller.

Turbo pump controller is not working correctly

Contact your Agilent Technologies service representative.

Turbo pump is not working correctly

Contact your Agilent Technologies service representative.

MSD electronics are not working correctly

Contact your Agilent Technologies service representative.