Obstruction or lack of pressure in gas supply
Leak or blocked filter
Bad gas flow module
Bad carrier board
Check that the gas supply pressure is between 80 psi and 100 psi.
Replace or temporarily bypass any filters.
Increase gas supply pressure to >110 psi if the N2 filter is not replaced annually.
Check all the gas connections for leaks
If the Gas Flow works at a low flow settings but not at a high flow setting, look for obstruction or limitation from the gas supply.
If this error continues to occur, copy this error on the screen and contact Agilent for more help.